O masini faaleotele leo MEMS e masani lava ona aofia ai masini microcapacitive MEMS, faʻaliliuga faʻapipiʻi micro-integrated, potu faʻalogo, ma RF anti-interference circuits.O le MEMS microcapacitance ulu e aofia ai se diaphragm silicon ma se eletise tua silicon mo le mauaina o le leo.O le diaphragm silicon e mafai ona maua saʻo le faailo leo ma tuʻuina atu i le micro-integrated circuit e ala i le MEMS micro-capacitance sensor.O le micro-integrated circuit e fa'aliliuina le maualuga-impedance leo eletise eletise ma fa'ateleina i se fa'ailo eletise maualalo, fa'amama e le RF anti-noise circuit i le taimi lava e tasi, ma fa'auluina se fa'ailo eletise e fetaui ma le mua'i li'o, le " acoustic-electrical” liua ua mae'a.E ala i le faitauina o faailo eletise, e iloa ai le leo.
Taimi meli: Tes-06-2022
